Mueller, Knut and Ryll, Henning and Ordavo, Ivan and Ihle, Sebastian and Strueder, Lothar and Volz, Kerstin and Zweck, Josef and Soltau, Heike and Rosenauer, Andreas (2012) Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device. APPLIED PHYSICS LETTERS, 101 (21): 212110. ISSN 0003-6951, 1077-3118
Full text not available from this repository. (Request a copy)Abstract
A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a scintillator-free direct electron detector with a frame time of 1 ms. We show that the applied algorithms can accurately detect Bragg beam positions despite a significant point spread each 300 kV electron causes during detection on the scintillator-free camera. For millisecond exposures, we find that strain can be measured with a precision of 1: 3 x 10(-3), enabling, e. g., strain mapping in a 100 x 100 nm(2) region with 0.5 nm resolution in 40 s. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4767655]
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | DETECTOR; HETEROSTRUCTURES; MOBILITY; STRESS; |
| Subjects: | 500 Science > 530 Physics |
| Divisions: | Physics > Institute of Experimental and Applied Physics > Chair Professor Back > Group Josef Zweck |
| Depositing User: | Dr. Gernot Deinzer |
| Date Deposited: | 04 May 2020 06:57 |
| Last Modified: | 04 May 2020 06:57 |
| URI: | https://pred.uni-regensburg.de/id/eprint/17780 |
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