Schwaiger, Stephan and Metzner, Sebastian and Wunderer, Thomas and Argut, Ilona and Thalmair, Johannes and Lipski, Frank and Wieneke, Matthias and Blaesing, Juergen and Bertram, Frank and Zweck, Josef and Krost, Alois and Christen, Juergen and Scholz, Ferdinand (2011) Growth and coalescence behavior of semipolar (11(2)over-bar2) GaN on pre-structured r-plane sapphire substrates. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 248 (3). pp. 588-593. ISSN 0370-1972,
Full text not available from this repository. (Request a copy)Abstract
Semipolar (11 (2) over bar2) oriented GaN has been grown on a pre-structured r-plane sapphire substrate. By using silicon doped marker layers (MLs) we have been able to monitor the growth evolution of the stripes until coalescence. With that technique we correlated the growth type (direction) with the results of cathodoluminescence (CL) and transmission electron microscopy. Both characterization methods show only a few defects for the major part of the structure and a relatively high defect density for material grown in a-direction at one side of the stripes. It is shown that during coalescence these defects are mainly terminated resulting in a flat, planar (11 (2) over bar2) GaN layer with strongly reduced defect density. Additionally, X-ray diffraction (XRD) measurements show the high quality of these layers. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | GALLIUM NITRIDE FILMS; SIDE FACETS; LAYERS; semipolar GaN; patterned sapphire; MOVPE; coalescence; marker layer |
| Subjects: | 500 Science > 530 Physics |
| Divisions: | Physics > Institute of Experimental and Applied Physics > Chair Professor Back > Group Josef Zweck |
| Depositing User: | Dr. Gernot Deinzer |
| Date Deposited: | 24 Jun 2020 14:36 |
| Last Modified: | 24 Jun 2020 14:36 |
| URI: | https://pred.uni-regensburg.de/id/eprint/21193 |
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