Huckemann, Till and Muster, Pascal and Langheinrich, Wolfram and Brackmann, Varvara and Friedrich, Michael and Komericki, Nikola D. and Diebel, Laura K. and Stiess, Verena and Bougeard, Dominique and Yamamoto, Yuji and Reichmann, Felix and Zoellner, Marvin H. and Dahl, Claus and Schreiber, Lars R. and Bluhm, Hendrik (2025) Industrially Fabricated Single-Electron Quantum Dots in Si/Si-Ge Heterostructures. IEEE ELECTRON DEVICE LETTERS, 46 (5). pp. 868-871. ISSN 0741-3106, 1558-0563
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This letter reports the compatibility of heterostructure-based spin qubit devices with industrial CMOS technology. It features Si/Si-Ge quantum dot devices fabricated using Infineon's 200mm production line within a restricted thermal budget. The devices exhibit state-of-the-art charge sensing, charge noise and valley splitting characteristics, showing that industrial fabrication is not harming the heterostructure quality. These measured parameters are all correlated to spin qubit coherence and qubit gate fidelity. We describe the single electron device layout, design and its fabrication process using electron beam lithography. The incorporated standard 90nm back-end of line flow for gate-layer independent contacting and wiring can be scaled up to multiple wiring layers for scalable quantum computing architectures. In addition, we present millikelvin characterization results. Our work exemplifies the potential of industrial fabrication methods to harness the inherent CMOS-compatibility of the Si/Si-Ge material system, despite being restricted to a reduced thermal budget. It paves the way for advanced quantum processor architectures with high yield and device quality.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | SPIN QUBIT; Logic gates; Noise; Electrons; Wiring; Quantum dots; Temperature measurement; Silicon; Fabrication; Tin; Oscillators; Quantum computing; quantum well devices; single electron devices; fabrication |
| Subjects: | 500 Science > 530 Physics |
| Divisions: | Physics > Institute of Experimental and Applied Physics > Chair Professor Huber > Group Dominique Bougeard |
| Depositing User: | Dr. Gernot Deinzer |
| Date Deposited: | 12 May 2026 07:13 |
| Last Modified: | 12 May 2026 07:13 |
| URI: | https://pred.uni-regensburg.de/id/eprint/67394 |
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