Items where Author is "Blietz, M."

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Hoelzl, Robert and Huber, A. and Fabry, L. and Range, Klaus-Jürgen and Blietz, M. (2001) Integrity of ultrathin gate oxides with different oxide thickness, substrate wafers and metallic contaminations. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 72 (3). pp. 351-356. ISSN 0947-8396, 1432-0630

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