Items where Author is "Pindl, S."
![]() | Up a level |
Group by: Item Type | No Grouping
Jump to: Article
Number of items: 1.
Article
Pindl, S. and Biebl, M. and Hammerl, E. and Schäfer, H. and von Philipsborn, Henning (1997) Oxidation enhanced diffusion of boron in silicon-on-insulator substrates. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 144 (11). pp. 4022-4026. ISSN 0013-4651, 1945-7111

