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University of Regensburg (2)
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Liu, Dongping and Benstetter, Günther and Lodermeier, Edgar and Vancea, Johann (2003) Influence of the incident angle of energetic carbon ions on the properties of tetrahedral amorphous carbon (ta-C) films. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 21 (5). pp. 1665-1670. ISSN 0734-2101, 1520-8559

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