Hanekamp, Patrick and Raith, Timo and Iffelsberger, Christian and Zankl, Tobias and Robl, Werner and Matysik, Frank-Michael (2019) Material contrast studies of conductive thin films on semiconductor substrates using scanning electrochemical microscopy. JOURNAL OF APPLIED ELECTROCHEMISTRY, 49 (5). pp. 455-463. ISSN 0021-891X, 1572-8838
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In this paper, a mediator-free scanning electrochemical microscopy (SECM) imaging concept is presented, which is capable of generating high electrochemical contrast and high spatial resolution between two conductive materials. The methodical approach is based on the hydrogen evolution reaction which shows potential dependent material selectivity. Various conductive thin films deposited on silicon substrates were studied. The investigated materials included copper, ruthenium, platinum, tantalum nitride, and titanium nitride. The hydrogen evolution was studied with chronoamperometry (E-substrate = 1 V vs. Ag/AgCl/3 M KCl) to characterize the material selectivity of this reaction for the above-listed thin films. SECM imaging in the substrate generation-tip collection (SG/TC) mode was carried out and applied to study the boundary regions of thin copper films in combination with the aforementioned thin film materials. In addition, the spatial resolution of hydrogen based SG/TC SECM imaging was characterized using lithographically fabricated platinum/copper structures as test substrates. For comparison, the common feedback mode was also applied for SECM imaging of the conducting thin film combinations. It was found, that only the hydrogen based SG/TC mode enabled SECM imaging with clear material contrast between different conductive materials which was not possible in the feedback mode.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | DIRECT COPPER ELECTRODEPOSITION; LINER MATERIALS; NUCLEATION; DEPOSITION; BARRIERS; GROWTH; LAYERS; TAN; Scanning electrochemical microscopy; Hydrogen evolution reaction; Thin film metals; Substrate generation-tip collection mode |
| Subjects: | 500 Science > 540 Chemistry & allied sciences |
| Divisions: | Chemistry and Pharmacy > Institut für Analytische Chemie, Chemo- und Biosensorik Chemistry and Pharmacy > Institut für Analytische Chemie, Chemo- und Biosensorik > Instrumentelle Analytik (Prof. Frank-Michael Matysik) |
| Depositing User: | Dr. Gernot Deinzer |
| Date Deposited: | 09 Apr 2020 10:31 |
| Last Modified: | 09 Apr 2020 10:31 |
| URI: | https://pred.uni-regensburg.de/id/eprint/27121 |
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