Co-sputtered MoRe thin films for carbon nanotube growth-compatible superconducting coplanar resonators

Goetz, K. J. G. and Blien, S. and Stiller, P. L. and Vavra, O. and Mayer, T. and Huber, T. and Meier, T. N. G. and Kronseder, M. and Strunk, Ch and Huettel, A. K. (2016) Co-sputtered MoRe thin films for carbon nanotube growth-compatible superconducting coplanar resonators. NANOTECHNOLOGY, 27 (13): 135202. ISSN 0957-4484, 1361-6528

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Abstract

Molybdenum rhenium alloy thin films can exhibit superconductivity up to critical temperatures of T-c = 15 K. At the same time, the films are highly stable in the high-temperature methane/hydrogen atmosphere typically required to grow single wall carbon nanotubes. We characterize molybdenum rhenium alloy films deposited via simultaneous sputtering from two sources, with respect to their composition as function of sputter parameters and their electronic dc as well as GHz properties at low temperature. Specific emphasis is placed on the effect of the carbon nanotube growth conditions on the film. Superconducting coplanar waveguide resonators are defined lithographically; we demonstrate that the resonators remain functional when undergoing nanotube growth conditions, and characterize their properties as function of temperature. This paves the way for ultra-clean nanotube devices grown in situ onto superconducting coplanar waveguide circuit elements.

Item Type: Article
Uncontrolled Keywords: MECHANICAL RESONATORS; ELECTRONICS; BLOCKADE; coplanar resonator; carbon nanotube growth; rhenium; molybdenum; XPS; superconductivity
Subjects: 500 Science > 530 Physics
Divisions: Physics > Institute of Experimental and Applied Physics > Chair Professor Weiss > Group Christoph Strunk
Depositing User: Dr. Gernot Deinzer
Date Deposited: 03 Apr 2019 10:05
Last Modified: 03 Apr 2019 10:05
URI: https://pred.uni-regensburg.de/id/eprint/3215

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