Millimetre-wave generation with semiconductor superlattice mounted in cavity fabricated by UV-photolithography and galvanoforming

Haeussler, M and Schomburg, E and Batke, JM and Klappenberger, F and Weber, A and Appel, H and Renk, KF and Hummel, H and Stroebl, B and Pavel'ev, DG and Koschurinov, Y (2003) Millimetre-wave generation with semiconductor superlattice mounted in cavity fabricated by UV-photolithography and galvanoforming. ELECTRONICS LETTERS, 39 (10). pp. 784-785. ISSN 0013-5194,

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Abstract

A fabrication technique for a waveguide cavity with submillimetre dimensions is reported. The cavity was composed of galvanoformed nickel structures. A mould for the galvanoforming was made from a thick-film UV-photoresist. Using a semiconductor superlattice as active element, generation of millimetre-waves (170 GHz) was observed, but with subharmonics owing to yet insufficient suppression of bias oscillations. The microstructuring technique may be suitable for the development of solid-state radiation sources up to THz frequencies.

Item Type: Article
Uncontrolled Keywords: TERAHERTZ APPLICATIONS; CURRENT OSCILLATION; ELECTRONS; GUIDE;
Subjects: 500 Science > 530 Physics
Divisions: Physics > Institute of Experimental and Applied Physics
Depositing User: Dr. Gernot Deinzer
Date Deposited: 17 May 2021 14:43
Last Modified: 17 May 2021 14:43
URI: https://pred.uni-regensburg.de/id/eprint/38999

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