Preparation of smooth YBa2Cu3Oy and EuBa2Cu3Oy films by two-beam excimer laser deposition

Schauer, T. and Weber, L. and Hafner, J. and Kus, Oliver and Pechen, E. V. and Varlashkin, A. V. and Kaiser, T. and Renk, Karl F. (1998) Preparation of smooth YBa2Cu3Oy and EuBa2Cu3Oy films by two-beam excimer laser deposition. SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 11 (3). pp. 270-272. ISSN 0953-2048

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Abstract

A laser deposition arrangement for the preparation of smooth YBa2Cu3Oy and EuBa2Cu3Oy films is presented. An excimer laser beam is split by a knife-edge prism into two beams, which are focused onto two rotating targets oriented perpendicular to each other. The two laser-induced molecular streams collide and form a new stream containing mainly light molecules and almost no droplets. The molecules from this stream deposit on a substrate that is placed in the shadow of the original molecular streams. The use of copper-poor targets prevented the occurrence of precipitates.

Item Type: Article
Uncontrolled Keywords: THIN-FILMS
Subjects: 500 Science > 530 Physics
Divisions: Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Karl F. Renk
Depositing User: Dr. Gernot Deinzer
Date Deposited: 28 Feb 2023 08:35
Last Modified: 28 Feb 2023 08:35
URI: https://pred.uni-regensburg.de/id/eprint/50070

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