Quantitative analysis of electron microscopic micrographs of multilayers

Schuhrke, T. and Zweck, Josef and Hoffmann, H. (1997) Quantitative analysis of electron microscopic micrographs of multilayers. THIN SOLID FILMS, 292 (1-2). pp. 118-123. ISSN 0040-6090

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Abstract

We present a method for the quantitative determination of some of the most important properties of multilayers from electron microscopic images of cross-sectional samples. The method is based on digital image processing using the cross-correlation between the real and an idealized layer structure to measure, for example, period lengths, waviness or variations in the layer width. The evaluation has been applied to micrographs of Pt/AlxOy, Fe/Au and Co/Cu multilayers, and the results compared with data from X-ray diffraction.

Item Type: Article
Uncontrolled Keywords: GIANT MAGNETORESISTANCE; ROUGHNESS; interfaces; multilayers; superlattices; transmission electron microscope
Subjects: 500 Science > 530 Physics
Divisions: Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Chair Professor Back > Group Josef Zweck
Depositing User: Dr. Gernot Deinzer
Date Deposited: 24 May 2023 08:09
Last Modified: 24 May 2023 08:09
URI: https://pred.uni-regensburg.de/id/eprint/51106

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