Observation of the Huygens-principle growth mechanism in sputtered W/Si multilayers

Salditt, T. and Lott, D. and Metzger, T. H. and Peisl, J. and Fischer, R. and Zweck, Josef and Hoghoj, P. and Schärpf, O. and Vignaud, G. (1996) Observation of the Huygens-principle growth mechanism in sputtered W/Si multilayers. EUROPHYSICS LETTERS, 36 (8). pp. 565-570. ISSN 0295-5075

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Abstract

We have investigated the interfacial roughness of a W/Si multilayer sputtered at high Ar gas pressure. The roughness exponents as determined from diffuse X-ray scattering agree well with the Huygens-principle growth model proposed by Tang, Alexander and Bruinsma (TAB). Simple microscopic explanations are given to account for the finding of Edwards-Wilkinson (EW) type growth at low Ar pressure and the TAB growth mechanism at high pressures, as well as for the absence of any scaling according to the Kardar-Parisi-Zhang (KPZ) equation.

Item Type: Article
Uncontrolled Keywords: THIN-FILM; SCATTERING; ROUGHNESS
Subjects: 500 Science > 530 Physics
Divisions: Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Chair Professor Back > Group Josef Zweck
Depositing User: Dr. Gernot Deinzer
Date Deposited: 25 May 2023 10:47
Last Modified: 25 May 2023 10:47
URI: https://pred.uni-regensburg.de/id/eprint/51282

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