Quantitative study of interface roughness replication in multilayers using X-ray reflectivity and transmission electron microscopy

Chladek, M. and Valvoda, V. and Dorner, C. and Holy, C. and Grim, J. (1996) Quantitative study of interface roughness replication in multilayers using X-ray reflectivity and transmission electron microscopy. APPLIED PHYSICS LETTERS, 69 (9). pp. 1318-1320. ISSN 0003-6951, 1077-3118

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Abstract

The recently appeared distorted wave Born approximation formalism is used for quantitative: determination of interface roughness replication and lateral correlation length in periodical multilayered structures. The results obtained from x-ray diffraction are in very good agreement with analysis of cross-section transmission electron micrographs, We interpret transparently the obtained parameters and demonstrate the ability of the low-angle x-ray diffraction methodology for nondestructive and quantitative studying of interface roughness in magnetic multilayers. (C) 1996 American Institute of Physics.

Item Type: Article
Uncontrolled Keywords: SCATTERING; SURFACES
Subjects: 500 Science > 530 Physics
Divisions: Physics > Institute of Experimental and Applied Physics
Depositing User: Dr. Gernot Deinzer
Date Deposited: 29 Jun 2023 06:37
Last Modified: 29 Jun 2023 06:37
URI: https://pred.uni-regensburg.de/id/eprint/51536

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