ZARSCHIZKY, H and STEMMER, A and MAYERHOFER, F and LEFRANC, G and GRAMANN, W (1994) BINARY AND MULTILEVEL DIFFRACTIVE LENSES WITH SUBMICROMETER FEATURE SIZES. OPTICAL ENGINEERING, 33 (11). pp. 3527-3536. ISSN 0091-3286,
Full text not available from this repository.Abstract
Binary and multilevel diffractive lenses with submicrometer feature sizes are realized on silicon and galliumphosphide wafers using CAD methods, direct write e-beam lithography, reactive ion etching, antireflection coating, and wafer dicing. Measurements prove aberration-free imaging and maximum diffraction efficiencies of 70% for lenses with high numerical aperture (NA) of 0.5. Comparisons to other miniature and micro-optical elements are carried out with respect to laser-to-single-mode-fiber coupling and show the competitive performance of the diffractive lenses. Arrays for 18-channel parallel receiver modules are fabricated in on-axis and off-axis versions. Optical crosstalk is estimated.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | ; MICROOPTICS; DIFFRACTIVE MICRO LENSES; LENS ARRAYS; CAD; E-BEAM LITHOGRAPHY; LASER-TO-FIBER COUPLING; OPTICAL CROSSTALK |
| Depositing User: | Dr. Gernot Deinzer |
| Last Modified: | 19 Oct 2022 08:39 |
| URI: | https://pred.uni-regensburg.de/id/eprint/53011 |
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