KUEHNEL, W and SHERMAN, S (1994) A SURFACE MICROMACHINED SILICON ACCELEROMETER WITH ON-CHIP DETECTION CIRCUITRY. SENSORS AND ACTUATORS A-PHYSICAL, 45 (1). pp. 7-16. ISSN 0924-4247,
Full text not available from this repository.Abstract
A monolithically integrated acceleration sensor is presented, which contains the complete detection circuitry on the same chip. It is fabricated by means of polysilicon surface micromachining. This design represents the first fully integrated accelerometer that completely meets the requirements of the automotive industry. The sensor structure itself consists of a differential capacitor, whose interdigitated fingers translate parallel to the chip surface. The detection circuitry works at high frequency with a 1 MHz carrier. The output signal of the accelerometer is fed back to the sensor element, so that an overall electromechanical dosed loop is built. This allows the sensor to work in a forced-balance mode, reducing the sensor deflection and thus noise and distortion. Additionally, an electrostatic activated self-test function of the sensor element is implemented. The overall sensitivity is 20 mV g(-1) with an acceleration range of +/-50g. Fundamentals of the fabrication process of the sensor element and basic theoretical considerations are presented. Measurement results of the complete 'sensor and circuit' system are given.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | ; ON-CHIP DETECTION CIRCUITRY; SILICON ACCELEROMETER; SURFACE MICROMACHINING |
| Depositing User: | Dr. Gernot Deinzer |
| Last Modified: | 19 Oct 2022 08:39 |
| URI: | https://pred.uni-regensburg.de/id/eprint/53071 |
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