Stepwise Fabrication and Optimization of Coplanar Waveguide Resonator Hybrid Devices

Kellner, Nicole and Huettner, Niklas and Will, Marco and Hakonen, Pertti and Huettel, Andreas K. (2023) Stepwise Fabrication and Optimization of Coplanar Waveguide Resonator Hybrid Devices. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 260 (12): 2300187. ISSN 0370-1972, 1521-3951

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Abstract

From the background of microwave-optomechanical experiments involving carbon nanotubes, the optimization of superconducting coplanar waveguide resonator devices is discussed. Two devices, one with unmodified geometry compared to previous work and one integrating several improvements, are lithographically built up step-by-step. After each step, the low-temperature GHz transmission properties are retested. This allows to identify the impact of the fabrication and the geometry modification on the device properties. In addition, simplified circuit geometries are modeled numerically, confirming the experimental results and providing further insights for optimization.

Item Type: Article
Uncontrolled Keywords: CARBON NANOTUBE GROWTH; QUALITY FACTOR; carbon nanotubes; coplanar waveguide resonator; filter; optomechanics
Subjects: 500 Science > 530 Physics
Divisions: Physics > Institute of Experimental and Applied Physics > Chair Professor Weiss > Group Andreas K. Hüttel
Depositing User: Dr. Gernot Deinzer
Date Deposited: 05 Apr 2024 05:28
Last Modified: 05 Apr 2024 05:28
URI: https://pred.uni-regensburg.de/id/eprint/59820

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